The GeminiSEM 500, purchased with the contribution of the University's "Grandi Progetti di Investimento" fund, was installed in July 2018.
The SEM with field emission source is equipped with numerous detectors and also provides working modes in low vacuum conditions (Variable Pressure) up to 500 Pa. It is equipped with EDS Microanalysis, OXFORD EDS Oxford Aztec Live con Detector Ultim Max 100.
Technical features
- Schottky type hot cathode field emission source
- Acceleration voltage from 0.02 to 30 KV
- Resolution: 0.6 nm at 15 KV
1 nm at 1 KV, 0.8 nm with sample bias
1.2 nm at 0.5 KV
- Gemini Nano-Twin lens column with beam booster and magnetic-electrostatic objective lens
- Tandem module for applying negative bias on the sample
- Variable pressure from 5 to 500 Pa. The Nano VP device reduces the beam spreading ( skirt effect ) typical in low vacuum conditions in order to reach high resolutions even at low acceleration voltages (1.3 nm at 3 KV at 30 Pa ) and optimize performance in microanalysis.
- Motorized eucentric 5-axis sample table
- Peltier cooling system for stage (-30 ° -50 ° C)
- Integrated plasma cleaner
- Remote control
Software
- SmartSEM software with Image Navigation function for Correlative Microscopy
- 3D surface Modeling for the three-dimensional topographic reconstruction of the sample surface
Detector
- In-Lens Detector for Secondary Electrons (SE)
- In-Lens Detector EsB (Energy selective Backscatter) for high-angle backscattered electrons (BSE), selected in energy
- Detector In-Chamber SE
- In-Chamber BSE detector with four independent sectors and fifth additional sector for topographic images and for long working distances
- VPSE Detector for SE in low vacuum conditions
- BSE detector integral with the Nano VP device
- Detector aSTEM solid state detector with 7 annular segments for BF, DF and HAADF
- Cathodoluminescence detector
- Sample induced current meter
- CCD IR Camera